Abstract
Two-dimensional vibration-assisted polishing (2D-VAP) is a new polishing approach proposed in recent years, which is considered to be very suitable for the polishing of micro-optical parts and micro-structured surfaces. The advantages of the 2D-VAP approach are as follows: A very high relative velocity can be obtained between the workpiece and the polishing tool; the desired motion trajectory can be formed in one polishing cycle. However, there are still some problems to be solved in the 2D-VAP approach, mainly involving: The vibration frequency of the resonant excitation cannot be regulated, which makes it difficult to adapt to the processing demands of different materials; the theoretical model of removal function has been studied in few papers; and motion coupling occurs easily between the horizontal and vertical directions, which affects the trajectory synthesized at the polishing tool. In order to solve these problems, a new approach to decoupled non-resonant polishing is developed in this paper, and its effectiveness is investigated by the theoretical analysis and polishing experiments. Theoretical studies of removal function show that the vibration frequency, vibration amplitude and loading force are proportional to the removal depth. The comparison of experimental and modeling results of removal function show that they have good coherence, and the correctness of the theoretical model of removal function is verified. In addition, the stability experiments of removal function prove that the polishing approach has better stability and is beneficial to the convergence of workpiece surface.
Highlights
Smooth and ultra-smooth surfaces are widely used in various engineering fields, such as aerospace engineering, medical equipment, optical telecommunication, nanotechnology and microelectronics
International academia and industry made a large quantity of theories and experimental researches to break through the traditional ways of polishing and put forward innovative ways of polishing in the recent past, such as magneto-rheological finishing [1,2,3], plasma assisted polishing [4,5], fluid jet polishing [6,7,8], two dimensional vibration-assisted polishing and other composite polishing methods [9,10,11,12]
It can be Mseicernomtahchaintesth20e19c,i1r0c,u4l8a4r closed motion trajectory at the output end is very close to the ideal 1c1irocf l2e1, which indicates that the decoupled non-resonant 2D-VAP device has good decoupling
Summary
Smooth and ultra-smooth surfaces are widely used in various engineering fields, such as aerospace engineering, medical equipment, optical telecommunication, nanotechnology and microelectronics. The advantages of non-resonant mode polishing devices are as follows: The vibration frequency of polishing tool can be adjusted autonomously; a large amount of heat can be avoided during processing due to the relatively low vibration frequency. There are still some problems of non-resonant mode polishing devices; the motion coupling in the synthetic trajectory of the polishing tool is one of the problems in the process. The flexure hinge mechanism with symmetric distribution is adopted in the device proposed in this paper, with which the coupling phenomenon at the polishing tool in the vibration polishing process can be effectively avoided. Few researchers have studied the theoretical model of removal function with the circular polishing trajectory in the previous non-resonant vibration-assisted polishing studies. The stability of removal function was studied in the experimental part, and the feasibility and stability of the polishing system proposed in this paper were verified by it
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