A new approach to analysis of reflection electron energy loss spectra

Abstract

A new approach is proposed for the analysis of reflection electron energy loss (REEL) spectra that were obtained for different electron-scattering configurations. A distinctive feature of the approach is that a REEL spectrum can be separated into two components that change in relative intensity with changes in the experimental configuration. No assumption is made about the number of peaks in the component spectrum and their shape. The suggested method is demonstrated on REEL spectra of aluminium, which is a traditional test object. It is established that in the range of energy losses 0–50 eV, the A1 REEL spectrum can be described by the sum of two components. The components of the spectra measured at different angles of primary electron incidence and exit angles for the detected electrons but with constant scattering angle have the same shape. The relative intensities of the two components define the spectral shape for different geometric conditions of the experiment. The shape of the components and their changes in relative intensity with change of primary electron energy give new information useful for development and further improvement of models used for studying medium energy (0.1–1.0 keV) electron scattering in the surface region of solids.