Abstract
The cyber-physical system (CPS) concept is now attracting attention in systems engineering. We attempt to apply CPS to a fully automated factory management and control in processes such as semiconductor fabrication. We propose a novel structure, designated as a real-virtual integrated system, based on the CPS concept, and construct manufacturing scheduling and WIP control. It is designed to follow current dynamic changes and large future fluctuations at production sites simultaneously by executing dynamic scheduling of the real system and by simulation of the virtual system interactively. The effectiveness of the proposed scheduling method can be examined more accurately for possible adaptation to a shop floor.
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