Abstract
A new angular-position detector capable of measuring the angular position of an incident light spot in a full range of 360° is proposed. The device principle is based upon the lateral photoeffect in Si and it is fabricated with standard planar IC technology. An inherently linear relation has been found theoretically between the output current of the device and the angular position of the incident light spot. Conclusions drawn from the calculations are confirmed by experimental results. The influence of the electrodes placed across the resistive layer on device linearity can be reduced by dividing the photocurrents measured from each electrode by the total photocurrent. Further improvement can be made if an electrode is isolated as the light spot moves over it.
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