Abstract
Micro-machining and micro/meso-scale machine tools (mMTs) use substantially different motion parameters than those used at the macro-scale. A new acceleration-based mMT performance evaluation methodology is developed based on an assessment of motion parameters, and in particular, unique acceleration requirements at the micro-scale. Performance evaluations using the new methodology are carried out on two prototype mMTs. Following errors are found for the most part to increase linearly with acceleration. The closed loop bandwidth is found to be the current major factor affecting acceleration capability for the machines tested. A linear model linking servo-update frequency, closed-loop bandwidth, acceleration and following error is proposed. The model results provide a basis for prescribing maximum acceleration values to maintain 10 −2–10 −3 relative accuracy. Future mMT component performance requirements are explored.
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