A new absorption-based method of X-ray microscopy using a nanofocusing refractive lens

Abstract

A new method for studying the internal structure of micro-objects using synchrotron radiation based on the use of a planar nanofocusing compound refractive lens is proposed. The method registers the integral intensity of radiation after passing through the object. In this case, locality is ensured by focusing the beam into a line of nanometer width. Phase contrast is not used. The profile of object thickness inside the x-ray beam is obtained immediately. However, the two-dimensional structure of the object image is calculated using the specific tomography method. The method does not require complex mathematical calculations and gives a result with a very high accuracy. An experiment was simulated with a silicon carbide substrate for typical values of all parameters to illustrate the operation of the method.