Abstract
A new method of two-dimensional (2D) plane displacement measurement based on an eddy current sensor is proposed in this paper. A series of grooves with different widths and depths are graved on the linear displacement table to form 2D absolute coding using the idea of pseudorandom coding. The eddy current sensor array is arranged above the groove to identify the coding. An artificial neural network is used to establish a measurement model which is the mapping relationship between the output of the eddy current sensor array and the 2D displacement of the workbench. A feasibility experiment showed that in the range of 20 × 20 mm, the root mean square error of measurement in the X- and Y-directions are 83 and 73 μm, respectively. The new method integrates eddy current sensor and artificial neural network modeling to realize 2D displacement measurement, which provides a new solution for displacement and angle measurement.
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