Abstract
We present a wireless and power-free, optomechanical, implantable microsensor that can potentially be used to accurately monitor intracranial pressure (ICP) over long periods of time. The developed microsensor vertically integrates a glass mini-lens with a two-wavelength quantum dot (QD) micropillar that is photolithographically patterned on an ICP-exposed silicon nitride membrane. The operation principle is based on a novel optomechanical transduction scheme that converts ICP changes into changes in the intensity ratio of the two-wavelength, near-infrared fluorescent light emitted from the QDs. The microsensor is microfabricated using silicon bulk micromachining, and it operates at an ICP clinically relevant pressure dynamic range (0-40 mmHg). The microsensor has a maximum error of less than 15% throughout its dynamic range, and it is extremely photostable. We believe that the proposed microsensor will open up a new direction not only in ICP monitoring but in other pressure-related biomedical applications.
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