Abstract
AbstractThe wear resistance of metal carbide-metal nacreous nanostructures is compared to that of a solid metal carbide hard coating. A reciprocating nanoscratch method has been developed which allows the assessment of wear resistance of the film independent of substrate type or film-substrate adhesion. A series of nominally 1 micron thick TiC-based multilayer films on Si substrates were produced using RF magnetron sputtering. A scratch protocol consisting of 70 reciprocal scratches each 9.5 m m in length was applied. Data reduction techniques were used to remove the effects of sample tilt and drift. The resulting normal displacement as a function of scratch cycles is used to compare the wear of different films on Si <111> substrates. Specific wear characteristics related to film morphology are examined. This investigation showed that this nanoscratch technique holds promise as a thin film wear characterization technique.
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