Abstract
Future micro/nanodevices will contain very small features such that liquidlubrication is not practical and inherent lubricity is needed. In this study, ananoscale friction investigation was carried out during the manipulation of Au andSiO2 nanoparticles on silicon using atomic force microscopy (AFM). Nanoparticle sliding wascharacterized by quantifying the lateral force associated with the AFM tip twisting as ithits the particle edge. The friction force varies with particle area and humidity,illustrating how meniscus forces on nanoparticles affect friction. A large tip slid on thenanoparticle-coated surface exhibited friction reduction due to nanoparticle sliding andcontact area reduction.
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