Abstract
The characteristics of an excimer radiation source pumped by a subnormal dc glow discharge in an Ar/Xe/Cl2 mixture with the source operating in a spectral range of 160–310 nm were studied. The emission intensities of the 175, 236, 258, and 308 nm bands due to the transitions ArCl (B-X), XeCl (D-X), Cl2 (D′-A′), and XeCl (B-X), respectively, were optimized in relation to the pressure, composition, and discharge current of the mixture.
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