Abstract

This paper presents a multi-sensor system for optical precise assembly. The system utilizes macro-micro robot for high precision assembly, which consists of a 6-DOF parallel robot for coarse positioning, a 5-DOF stage driven by piezoelectric actuators for fine positioning, a gripper, a multi-sensor system, and an optical system. Mechanism design and control system design of the coarse-fine positioning stage are discussed. In order to achieve high precision in optical assembly, a multi-sensor control system is established, which includes a micro displacement detecting module, a signal analyzing module, a vision module, and a force sensor. Some control algorithms for image recognition and signal analysis are proposed, which can monitor the optical assembly in real-time. The experimental results validate the feasibility of the optical precise assembly system.

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