Abstract

Touchscreens have been prevalent in daily life and ubiquitously applied in consuming electronics, industrial control systems, and other applications as human computer interfaces (HCIs), which offers a convenient way for the human to interact with the smart devices. However, the lack of tactile force feedback from these conventional touchscreens draws limitations on the dexterity and intuitiveness of those devices, which results in multi-level menus, waiting, multi-finger gestures, and so on. To enhance and diversify functions of touchscreens, this paper presents a multi-axis tactile sensor array prototype with a unique layered structure, which is capable of sensing both 3-directional tactile force and location information over an area of 60 mm $\times60$ mm by utilizing only $2\times2$ piezoresistive MEMS force sensors. This paper integrated the sensibility of tangential force and normal force within one system, which sheds light on multi-axis tactile applications and dramatically reduced the number of tactile cells. The sensor array design, fabrication and packaging, and test approaches have been discussed in this paper. Qualitative and quantitative analysis have been conducted to evaluate the performance of the tactile sensor array with tested force range of 0.1 ~ 0.5 N. The results demonstrated the functionality of proposed sensor array, which exhibited promising potential for touchscreen applications. [2017-0176]

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