A Monolithic Integration Bio-Inspired Three-Dimensional MEMS Vector Hydrophone

Jinlong Song,Renxin Wang,Guojun Zhang,Wendong Zhang,Zhenzhen Shang,Lansheng Zhang

doi:10.1109/access.2019.2924990

Jinlong Song, Renxin Wang + Show 4 more

Open Access

https://doi.org/10.1109/access.2019.2924990

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Abstract

Three-dimensional vector hydrophone plays an important role in underwater spatial location. In order to solve the problems of monolithic integration and linearity of previous three-dimensional vector hydrophones, a three-dimensional micro-electro-mechanical system (MEMS) vector hydrophone based on the piezoresistive effect and bio-inspired principle is proposed in this paper. Different from previous three-dimensional vector hydrophone, this three-dimensional MEMS vector hydrophone is monolithically integrated. It has the characteristics of high consistency and batch production. Acoustic pressure gradients in xand y-directions are detected by the cilium, and acoustic pressure gradient in the z direction is detected by the supporting block and beams. Mathematical models of longitudinal stress on the surface of beams and the first three-order natural frequencies of the hydrophone are established. The simulation results prove the accuracy of the mathematical models. Specific structure parameters of hydrophone are determined and then the designed hydrophone is fabricated on a silicon-on-insulator (SOI) wafer. Finally, the sensitivities and directivities of designed hydrophone are tested. The sensitivities of X-channel and Z-channel are -187 dB and -163 dB (0 dB referring to 1 VμPa -1 ) at 400 Hz, respectively. The test results show that the hydrophone promising in spatial location.

Highlights

Up to now, sonar still plays an important role in underwater applications, such as target detection and tracking, hydrographic surveying, and acoustic communications, etc [1]–[3]
In order to meet the demand of 3D spatial orientation, we have developed several kinds of three-dimensional vetctor hydrophones
SENSITIVE PRINCIPLE Figure 1 reveals four kinds of three-dimensional vector hydrophones are designed previously by our research team based on bio-inspired principle

Summary

INTRODUCTION

Sonar still plays an important role in underwater applications, such as target detection and tracking, hydrographic surveying, and acoustic communications, etc [1]–[3]. Zhang and Xue et al of North University of China proposed a MEMS vector hydrophone based on the principle of fish sensing sound waves [28]–[30]. This hydrophone can only measure two-dimensional sound field vector information. A monolithic integrated threedimensional vector hydrophone was presented in this paper It has the advantages of simple structure, suitable for mass production, wide bandwidth and high sensitivity. SENSITIVE PRINCIPLE Figure 1 reveals four kinds of three-dimensional vector hydrophones are designed previously by our research team based on bio-inspired principle.

MATHEMATICAL MODELS

EXPERIMENTS

CONCLUSION