Abstract
A molecular beam detector was designed to measure the specific outgassing rate of metal samples in the UHV region at reduced influence of the gas desorbed from the walls of the chamber. The detector consists of a nude Bayard-Alpert gauge surrounded by a liquid nitrogen cooled stainless steel tube. The orifice in direction to the sample was designed as a multicapillary system (MCS) containing 85 capillaries of 1 mm diameter. Molecules desorbed from the sample can reach the interior of the detector directional resolved by the MCS and can be detected. A shutter between the MCS and the sample is used for the determination of the background of the equipment. The derivation of the formulae for the determination of the specific outgassing rates from the pressure measured in the detector chamber is explained. First experimental results are discussed.
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