A modified thickness extensional disk transducer

Abstract

Photolithography and chemical etching were investigated as a means of patterning miniature piezoelectric devices. Using a processing procedure analogous to that utilized in the production of integrated circuitry, concentrated hydrochloric acid and a commercially available photoresist were used to fabricate a number of complex structures from soft lead zirconate titanate (PZT) substrates. Among the devices produced in this manner was a modified thickness-mode resonator etched to destroy the simple geometry responsible for radial vibrations. The resultant transducer demonstrated significantly smaller amplitudes for lateral resonances and a marked reduction in the effective planar coupling coefficient over the unaltered disk. The results indicate that photolithographic patterning is useful both for eliminating spurious resonances from transducers for medical imaging or nondestructive evaluation and for engineering low planar coupling coefficients into a variety of substrate materials.