Abstract

Thermoelastic damping (TED) determines the upper limitation of quality factors of micro- and nanobeam resonators. Accurate determination of thermoelastic damping (TED) is momentous and significant for the design of micro- and nanobeam resonators under the non-Fourier effect. Guo et al have developed an analytical TED model for rectangular cross-section micro- and nanobeam resonators with non-Fourier theory of dual-phase-lag model. However, there exist some errors in their model. In this work, basing on the non-Fourier theory of dual-phase-lag model, a modified TED model for the micro- and nanobeam resonators with rectangular cross-section is derived for the first time. Results show that the TED behaviors depend on the ratio of dual-phase-lag constants significantly and are independent of the beam aspect ratio.

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