Abstract
A modified variant of the LEMPUS-1 experimental setup is described, which was designed in order to extend the possibilities of performing investigations of plasma-chemical reactions and cluster-formation processes in gas jets in a pulse outflow regime, as well as technological processes during cluster-ion surface treatment. This setup provides the mass spectroscopy of molecular beams that are formed from supersonic gas jets and gas mixtures, studying of the plasma-chemical reactions that are initiated in jets by self-sustained and nonself-sustained discharges, studying of the cluster formation processes in gas mixtures, simulation of the supersonic-outflow processes with high flow rates from sonic and supersonic nozzles. Installing high-performance oil-free vacuum pumps makes it possible to investigate the processes in gas jets in the presence of hydrocarbon contaminants. Equipping the setup with ionization and flow-acceleration systems provides studying of the interaction processes of clusters and ions with a solid surface during gas-jet treatment of coatings.
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