Abstract
A capacitance humidity sensor is used as a test de- vice to characterize the performance of thirteen polyimide films in relative humidity sensing applications. This sensor has a multilayer, free-standing film construction. It consists of a humidity sensitive polyinfide dielectric core and conductive layers consisting of carbon filled polysul- fone on each side of the polyimide film to form a capacitor. Thirteen polyimide films, including commercial polyimides and films of novel chemistry, are investigated to determine the long term stability of sensors using the films exposed to 85'C/85% RH for a total of 28 days. Differences in film chemistry are used to interpret trends in the environmental stability of the films.
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