Abstract
A model for the evolution of surface nanorelief under irradiation with gas cluster ions is proposed. The model is based on consideration of individual collisions of clusters with a surface. The amount of substance sputtered from the collision area and the e ciency of its redeposition onto other surface elements are determined. The performance of the model is shown when compared with experimental data. The stages of smoothing of a harmonic relief are studied. A new measure of the e ectiveness of surface smoothing is proposed.
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Schedule a callMore From: Vestnik Moskovskogo Universiteta, Seriya 3: Fizika, Astronomiya
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