A Model for Electron Collision in SF6Gas Feeding into a Q-Machine Plasma

Abstract

Electron collision processes in a plasma with negative ions that were generated by feeding a small amount of SF 6 gas into a contact ionization plasma ( e.g. , Q-machine plasma) were numerically analyzed using a collision-in-cell model. The numerical results are as follows. The density of SF 6 - is predominant, and is over four times that of SF 5 - 's. Many of the electrons which underwent vibrational collision, attach to SF 6 in subsequent collisions. The electron density can be controlled in a wide range depending on SF 6 gas pressures.