A model for column angle evolution during oblique angle deposition

Abstract

We present a semiempirical model based on the shadowing effect to describe quantitatively the aggregation of columnar structure during physical vapor condensation onto a surface with an array of line seeds and a flat surface. Specifically, we predict the relationship between the column angle and the incident flux angle and how this relationship changes with processing conditions and materials. The model uses one input parameter, the fan angle generated at normal incident flux. The model describes well our experimental data on the Ge column angle evolution as a function of a wide range of incident flux angles.