Abstract
Applying the principle conception of sputtering theory a calculation of the molecule emission yield in the energy range of the bombarding ions up to 1 keV is given. The possible molecule emission processes are discussed in detail in two specific cases: A calculation of the yield of diatomic and triatomic molecules containing equal atoms is performed; a rough estimation of the yield of diatomic molecules containing atoms of quite different masses is given. The comparison with experimental values of metal dimers, trimers, nitrides and oxides shows good agreement of the essential features as magnitude, energy and material dependence of the yield.
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