Abstract
This paper reports a DC electric field sensor (EFS) based on the mode localization phenomenon. The EFS consists of 3-degrees-of-freedom weakly coupled resonators (WCRs) and two capacitor arrays that are electrostatically coupled with the WCRs. The capacitor arrays sense the electric field and produce a stiffness perturbation that causes an amplitude ratio change of the WCRs. The EFS is fabricated using a silicon-on-insulator process and evaluated in a vacuum chamber. The amplitude ratio of the resonators changes from 2.2 to 7.5 as the electric field strength ranges from 0 to 7 kV/m, with a sensitivity of 0.76 /(kV/m). The noise, resolution, and stability of the mode-localized EFS are 11.5 (V/m)/√Hz, 22.9 V/m, and 9.1 V/m, respectively, which are competitive compared with that of other high-performance micromachined EFS.
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