Abstract
A high-precision implantable pressure sensor with ultrasonic power-up and data uplink is presented. The fully packaged implant measures $1.7 \times 2.3 \times 7.8$ mm3 and includes a custom IC designed in a 180-nm HV BCD process, a pressure transducer, an energy storage capacitor, and a single piezoelectric transducer (piezo). In order to reduce overall dimensions, unique circuit and system design techniques are presented to enable a single time-multiplexed piezo for both power recovery and data uplink transmission. Implant performance is characterized at significant depths, 12 cm in a tissue phantom, offering a $>13\times $ improvement over state of the art in the depth/volume figure of merit, while demonstrating a robust ultrasonic data uplink with better than 10−5 bit error rate. A transient charging analysis is presented to derive the optimal piezo impedance and charging specifications to maximize overall harvesting efficiency. The IC features a front end with a 10-bit SAR ADC achieving a pressure full-scale range of 800 mmHg with a pressure resolution of 0.78 mmHg, exceeding the requirements for a wide range of in vivo pressure sensing applications. The pressure sampling rate is fully externally controlled, up to 1 ksps, in order to significantly decrease implant energy consumption and to allow for adaptable programming for specific applications.
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