Abstract
A robust and highly miniaturized optical gas sensor based on optical absorption spectroscopy is presented. By using the resonator cavity of a linear variable optical filter (LVOF) also as a gas chamber, a compact and robust optical sensor is achieved. The device operates at the 15th order in 3.2–3.4μm wavelength range for distinguishing hydrocarbons. The physical cavity length at the μm-level is translated into an effective optical absorption path length at the mm-level by the use of highly reflective (R>98%) Bragg mirrors. The optical design using the Fizeau interferometer approach is described. Moreover, the CMOS-compatible fabrication method is explained. In addition to the wideband and single wavelength filter characterization, absorption of methane in the LVOF cavity is demonstrated at 3392nm and 3416.60nm wavelengths.
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