Abstract
In this letter, we report a miniaturization strategy for harvesting a low-frequency random vibration energy with a piezoelectric energy harvesting (EH) system utilizing coupled Helmholtz resonance and vortex shedding effect. This is made possible by transferring the low-frequency vibration energy into a pressurized fluid, which is in turn converted into predefined, pressure-independent high-frequency energy harvested by the device. The vibration-pressurized fluid conversion extends the device sampling frequency band; enables efficient harvesting of broadband low vibration frequencies with small form factor. Proof of concept of the proposed strategy has been demonstrated with an AlN-based MEMS EH, which delivered an output power density of 95.5 mW/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> under a constant input airflow at 4.2 lbf/in <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> pressure.
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