A Miniature PMUT Array for Medical Applications

Abstract

Abstract Wearable continuous monitoring technology and internal and cerebrovascular imaging are the frontier hot area of current scientific research, which are of great significance to improving human life and health. Ultrasonic imaging can obtain information such as deep tissue structure by transmitting ultrasonic waves into the tissue and detecting echo signals, and ultrasonic imaging technology has the advantages of high imaging depth, high resolution, high safety, fast and convenient, etc. It is one of the important technologies in the medical field such as wearable continuous monitoring technology and internal cardiovascular and cerebrovascular imaging. But miniaturization and low power consumption are necessary conditions for the success of such medical applications. Therefore, the ultrasonic imaging technology using a miniature ultrasonic probe is one of the most promising imaging technologies for this type of medical application. Aiming at the common technical problems of traditional ultrasonic transducers such as large volume, narrow bandwidth, high power consumption, difficulty in preparing two-dimensional arrays, and difficulty in integrating with ICs. In this paper, the electromechanical-acoustic multi-field coupling mechanism and array structure design technology of MEMS high-performance PMUT ultrasonic transducer elements are first studied, and a CMOS-compatible miniature PMUT high-performance array ultrasonic device suitable for this type of medical application is developed. The simulation results of the transducer are given. The measurement of various physical parameters of the transducer sample and the results of its application in the ultrasonic imaging system show that the miniature PMUT linear array ultrasonic sensor we designed is a kind of high performance ultrasonic array sensors that can be widely used in wearable continuous monitoring technology and internal cardiovascular and cerebrovascular imaging.