Abstract
With the increasing application field, a higher requirement is put forward for the mass spectrometer. The reduction in size will inevitably cause a loss of precision; therefore, it is necessary to develop a high-performance miniature mass spectrometer. Based on the researches of rectangular ion trap, the relationship between mass resolution and structural parameters of the ion trap array was analyzed by further simulation. The results indicate that, considering the balance of mass resolution and extraction efficiency, the preferable values for the field radius of exit direction y0 and ion exit slot width s0 are 1.61 mm and 200 μm, respectively. Afterwards, a miniature four-channel ion trap array (MFITA) was fabricated, by using MEMS and laser etching technology, and mass spectrometry experiments were carried out to demonstrate its performance. The mass resolution of butyl diacetate with m/z = 230 can reach 324. In addition, the consistency of four channels is verified within the error tolerance, by analyzing air samples. Our work can prove the correctness of the structural design and the feasibility of MEMS preparation for MFITA, which will bring meaningful guidance for its future development and optimization.
Highlights
Mass spectrometry is an important material analysis method nowadays
The field radius is one of the key factors that determines the performance of mass analysis [14,27], especially for the miniature ion trap
In order to obtain the optimal value of the field radius of exit direction y0, we simulated the effect of different y0 on the mass analysis performance of the miniature four-channel ion trap array
Summary
Mass spectrometry is an important material analysis method nowadays. It has been widely used in many research fields, such as chemical analysis, drug metabolism, clinical medicine, environmental protection, food safety, anti-terrorism, public emergencies, and military technology [1,2,3,4,5]. The handheld mass spectrometer is popular because of its extremely high portability and practicality. Yang et al reported a handheld mass spectrometer PPMS that can be carried by individual soldiers for chemical warfare agent detection [6]. The MX908 handheld mass spectrometer, developed by the American device company, can be used in the fields of space exploration, emergencies, and public safety
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