Abstract

Electro-rheological fluids (ER fluids) allow direct interfacing between electric signals and fluid power without moving parts such as servo valves having spools driven by solenoids. In this paper, we apply ER fluids to fluid power control systems, especially to mini flow control valves (mini ER valves). A four-ports mini-ER valve whose size is 22mm cubic is manufactured, which can drives a small-sized piston cylinder at an amplitude of 0.5mm with a frequency of 2Hz or at an amplitude of 5mm with a frequency of 0.1Hz. It is confirmed that ER valves can be applied to micro valves.

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