Abstract
We report an electrothermally-actuated microlens scanner that is suitable for biomedical imaging applications. The microlens has a large tunable range and a low driving voltage, and the lens is made of glass. The enabling device is a new electrothermal actuator design that is capable of large vertical actuation (~0.9 mm) on a 3 mm device footprint, with small lateral shift (<; 7 μm) and tilting (<; 0.38°) at less than 4-V. The design, fabrication and characterization of the actuator are presented. Imaging results by the assembled microlens are also demonstrated.
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