Abstract
In this paper, a millimeter-wave air-filled slot antenna is presented based on bulk silicon microelectromechanical systems micromachining technology. The antenna is suitable for system-in-package application by utilizing this silicon micromachining technique. To achieve high radiation efficiency in millimeter-wave band, three gold-plated silicon layers are bonded together to realize an air-filled slot antenna. The air-filled structure has the advantages of reducing transmission loss and enhancing the radiation gain. To mitigate the discontinuity between silicon and air, the proposed antenna employs a patch to feed the air-filled structure that also broadens the impedance bandwidth. Owing to the micromachining technique and the air-filled structure, the antenna can be easily integrated with integrated circuit without suffering from dielectric loss. The measured impedance bandwidth of the proposed antenna is 56.3–63.4 GHz, and the measured peak gain is 7.8 dBi at 60 GHz.
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