Abstract
A capacitive displacement sensor matching the physiological characteristic of the human middle ear is presented. The transducer measures tiny deflections of the umbo, a part of the middle ear bone chain, to evaluate sound events stimulating the eardrum. Compared to other approaches, our sensor delivers a lower susceptibility to gravity due to a higher resonant frequency. Furthermore, measurement results in the lower frequency range are competitive to other research groups. Within the frequency range of 200Hz to 10kHz, a resolution of 4 pm is achieved using a signal processing bandwidth of 100Hz. This resolution is equivalent to the lower threshold of speech or to a loudness level of 40 phon.
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