Abstract
A miniaturized reliability test system for microdevices with controlled environmental parameters is presented. The system is capable of measuring key electrical parameters of the microdevices while controlling the environmental conditions around the microdevices. The test system is compact and thus can be integrated with standard test equipment for microdevices. By using a feed-forward decoupling algorithm, the presented test system is capable of generating a temperature range of 0–120 °C and a humidity range of 20–90% RH (0–55 °C), within a small footprint and weight. The accuracy for temperature and humidity control is ±0.1 °C and ±1% RH (30 °C), respectively. The functionality of the proposed test system is verified by integrating it with a piezo shaker to test the environmental reliability of an electromagnetic vibration energy harvester. The proposed system can be used as a proof-of-technology platform for characterizing the performance of microdevices with controlled environmental parameters.
Highlights
Reliability of microelectromechanical system (MEMS) is one of the essential factors that determines the development time and time-to-market of the devices
We proposed a miniaturized reliability test system for microdevices with controlled environmental parameters, which has the advantages of lightweight, small volume, wide and stable range of controllable environmental parameters
The system can be integrated with the piezo shaker, white light interferometer and other equipment to complete the performance characterization of microdevices under different environmental conditions
Summary
Reliability of microelectromechanical system (MEMS) is one of the essential factors that determines the development time and time-to-market of the devices. Jan et al proposed a test platform that combines a double-layer environmental chamber and a vibration shaker to study the effect of temperature and humidity on the resonant frequency of a CMOS-MEMS paddle resonator [4]. Most of the piezo shakers can generate very limited force, often in the range of tens of Newton, it is equivalently difficult to mount an oven, even the lightest one, on the piezo shaker Such dilemma might be the detrimental factor for the lack of reliability of vibration energy harvesters (VEHs), in spite of a great deal of effort in developing various novel VEH devices [8,9,10,11]. There is a strong need and market pull for standard generators of different environmental condition (environmental chambers), which can be integrated on different standard MEMS test equipment. The test system in this paper is a specific system, it provides a technical platform for the reliability test of microdevices and can be widely used
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