Abstract
In this paper, a microscale high-frequency ultrasonic transducer was prepared by combining traditional planar ultrasonic phased-array technology and micro processing technology. The piezoelectric ceramic material PZT was used as the functional material of the transducer. The number of the arrays was 72, the width of each array was 50 μm, the pitch of each array was 70 μm, and the length of each array was 3 mm. The PZT chip was finely ground to a thickness of 130 μm and could reach a frequency of 10 MHz. The experimental platform of micron-scale precision was set up for a beam-forming lateral sound field test and imaging experiment to validate the theoretical analysis. The echo imaging test showed that a mold with a feature size of about 400 μm could be imaged well.
Highlights
Ultrasonic transducers have been used in many applications and are famous for nondestructive testing (NDT) and medical imaging
Conventional ultrasonic transducers are largely based on bulk piezoelectric ceramics
The micro-transducers used for micro-structure detection are mainly micro-electromechanical ultrasonic transducers (MUTs) with a compliant membrane structure [3,4], including capacitive micromachined ultrasonic transducers and piezoelectric micromachined ultrasonic transducers [5,6]
Summary
Ultrasonic transducers have been used in many applications and are famous for nondestructive testing (NDT) and medical imaging. MUTs mainly use silicon-based ultrasonic transducer array technology prepared by MEMS technology [7], and their working mode bends the vibrations of the piezoelectric transducer. They usually need silicon and a micro-machining process such as bonding. The coupling coefficient and other key indicators of pMUTs are significantly affected by the silicon membrane [10], piezoelectrical materials, and top electrode thickness as well as the top electrode design [11] This greatly increase the difficulty of and the cost of the preparation process. Large detection depth, and relatively simple preparation technology, they can be used for ultrasonic detection of micro-scale characteristic structures, such as in skin testing
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