Abstract
A novel micromachined silicon displacement sensor based on the conductionof heat between two surfaces through the ambient air is described. Adisplacement resolution of less than 1 nm and a dynamic range of more than100 µm was achieved in a 10 kHz bandwidth. To minimize drift, the sensors are operated in pairs,using a differential measurement configuration. The power consumption of thesedevices is on the order of 10 mW per sensor, and the measured time response isdescribed by a simple exponential with a time constant of approximately100 µs.
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