Abstract
This article presents a piezoelectric-actuated microgripper that mainly consists of a three-stage flexure-based amplification mechanism to achieve a large magnification ratio with an excellent linearity, a large operating bandwidth, and a great force output capacity for micromanipulation and assembly. The first two stages are configured as two bridge-type parallelogram amplification mechanisms connected in serial to provide advantages in terms of high structural stiffness and compactness. This configuration is capable of generating large forces to maintain the following connection leverage mechanism and ensure a large displacement output, and also produces a stable amplification ratio insensitive to the input change. The finite element method-based simulation has been performed to investigate both static and dynamic characteristics of the designed microgripper. Simulation-enabled structural optimization design has been implemented to further aid and improve the proposed design. The simulation results indicate that the amplification ratio reaches 30.3 with a maximum clamping force of up to 2.17N. The gripper prototype has been fabricated based on the wire electrodischarge machining technique, and its performances have been validated through pick-and-place of microbeads experiments and dynamic tests. The experimental results have demonstrated the large amplification ratio of 31.88 with excellent linearity, and the motion stroke of 218 μm with a large grasping force up to 1993 mN. They well match the results from both simulation and theoretical calculation in terms of motion range and amplification ratio.
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