Abstract
Abstract The wall-shear-stress is the force parallel to a surface caused by a flow, which propagates parallel to the surface. Although there are several methods in use, there is a lack of sensors able to provide a high time resolution as well as the detection of flow reversals. This paper presents a micromechanical surface fence sensor, which consists of a 100–300 μm high and 7–10 μm thick silicon fence and a “body” for contacting and packaging. Four piezoresistors, connected to a Wheatstone bridge, measure the deflection of the fence and transform it into an electrical signal. Different fence geometries have been designed, simulated by FEA, fabricated and tested in a probe system as well as in a wind tunnel. With the most sensitive design, a resolution of 20 mN/m 2 has been achieved. With this performance, the device is suitable for a number of applications in aerodynamic research.
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