Abstract
As the core component of the sense of touch, flexible pressure sensors are critical to synchronized interactions with the surrounding environment. Here, we introduce a new type of flexible capacitive pressure sensor based on a template of electrodes, with a one-dimensional pyramid micropatterned structure on a Polydimethylsiloxane (PDMS) substrate and a dielectric layer of polystyrene (PS) microspheres. The proposed sensor exhibits a stable and high sensing sensitivity of 0.741 kPa−1 to capacitance, good durability over 1000 cycles, and fast response time (<150 ms). Our flexible capacitive sensor responds not only to pressure but also to bending forces. Our device can be used to monitor the location and distribution of weight pressure. The proposed capacitive pressure sensor has itself been applied foreground in lots of aspects, such as electronic skins, wearable robotics, and biomedical devices.
Highlights
Flexible pressure sensors have been well-documented, owing to their new and untraditional applications in robotic systems, electronic skin, touch interfaces, and wearable medical devices.Researchers have continued to focus on improving the sensing sensitivity and reliability of flexible pressure sensors for application in a pressure range of less than 50 kPa to mimic human skin and tactile receptors
When an external pressure is loaded on the sensor, the elastomeric dielectric layer exhibits different deformation, which leads to a variation in the capacitance
Nanomaterials, such as nanowires [13,14,15], carbon nanotubes [4,16], polymer nanofibers [5,17], metal nanoparticles [18], and graphene [19] have been used with elastomeric dielectric layers to develop novel flexible capacitive pressure sensors
Summary
Flexible pressure sensors have been well-documented, owing to their new and untraditional applications in robotic systems, electronic skin, touch interfaces, and wearable medical devices.Researchers have continued to focus on improving the sensing sensitivity and reliability of flexible pressure sensors for application in a pressure range of less than 50 kPa to mimic human skin and tactile receptors. Many methods have been proposed to realize pressure sensitivity based on piezoelectric [1,2,3], piezoresistive [4,5], and piezocapacitive types [6,7] of sensors. Capacitive-type pressure sensors that are based on elastomeric dielectric materials have been widely demonstrated [10,11,12]. When an external pressure is loaded on the sensor, the elastomeric dielectric layer exhibits different deformation, which leads to a variation in the capacitance. Nanomaterials, such as nanowires [13,14,15], carbon nanotubes [4,16], polymer nanofibers [5,17], metal nanoparticles [18], and graphene [19] have been used with elastomeric dielectric layers to develop novel flexible capacitive pressure sensors
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