Abstract
The ability to measure pressure and force is essential in biomedical applications such as minimally invasive surgery (MIS) and palpation for detecting cancer cysts. Here, we report a force sensor for measuring a shear and normal force by combining an arrayed piezoelectric sensors layer with a precut glass top plate connected by four stress concentrating legs. We designed and fabricated a thin film piezoelectric force sensor and proposed an enhanced sensing tool to be used for analyzing gentle touches without the external voltage source used in FET sensors. Both the linear sensor response from 3 kPa to 30 kPa and the exact signal responses from the moving direction illustrate the strong feasibility of the described thin film miniaturized piezoelectric force sensor.
Highlights
A Micro-Fabricated Force Sensor Using an All Thin FilmJunwoo Lee 1, Wook Choi 1, Yong Kyoung Yoo 1, Kyo Seon Hwang 2, Sang-Myung Lee 3, Sungchul Kang 2, Jinseok Kim 2,†,* and Jeong Hoon Lee 1,†,*
Tactile and force sensing by mimicking human skin has recently received a great deal of attention and much progress has been made in developing highly sensitive force and tactile sensors [1,2,3,4,5]
As the first step of device fabrication, we developed a MEMS thin-film piezoelectric sensor with the dimensions of 10 mm × 12 mm and composed of seven multi-layers
Summary
Junwoo Lee 1, Wook Choi 1, Yong Kyoung Yoo 1, Kyo Seon Hwang 2, Sang-Myung Lee 3, Sungchul Kang 2, Jinseok Kim 2,†,* and Jeong Hoon Lee 1,†,*. Received: 25 June 2014; in revised form: 16 October 2014 / Accepted: 11 November 2014 /
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