Abstract
This paper presents a micro-coordinate measuring machine (micro-CMM) for large-scale dimensional measurement of a micro-slit on a precision die coater by using a shear-mode micro-probe. A glass micro sphere with a nominal diameter of 52.3 μm was attached on one end of a tapered glass capillary tube as a probe tip ball. The micro-slit width of a slot die coater with a nominal slit width of 85 μm was measured by the micro-CMM. The probe tip was placed in the slit for the measurement. The effective working length of the probe was confirmed experimentally to be at least 1 mm. In order to measure the gap width uniformity over the entire slot die length of 200 mm, an air-bearing linear slide with a travelling stroke of 300 mm was employed in the micro-CMM to position the probe along the length direction of the slot die. The angular alignment error and the motion error of the air-bearing linear slide as well as those of the stages for positioning the probe along the direction perpendicular to the length direction of the slot die were investigated for evaluation of the expanded uncertainty of gap width measurement.
Highlights
Machined micro-features have been utilized widely with the development of micro-fabrication technologies such as micro-cutting [1,2], micro- electrical discharge machining (EDM) [3,4], micro- and nano-lithography [5,6], nanoimprint [7] and micro-molding [8]
This paper presents a micro-CMM designed for the slit width measurement of the precision die coater
The reliability of the measurement results a schematic of the angular alignment errors of the moving stages
Summary
Machined micro-features have been utilized widely with the development of micro-fabrication technologies such as micro-cutting [1,2], micro- electrical discharge machining (EDM) [3,4], micro- and nano-lithography [5,6], nanoimprint [7] and micro-molding [8]. More precision micro-features with high aspect ratios represented by deep micro-holes and micro-slits are utilized for precision tools and measuring instruments that require sub-micrometric or nanometric dimensional accuracies. The requirements for dimensional measurements of precision micro-features with high aspect ratios are increasing. The slot die is a precision tool for coating of functional liquid materials on the surface of a substrate such as a glass plate or a film. On the top of the slot die coater is a micro-slit from which the liquid material is extruded. Since the gap width of the micro-slit as well as its uniformity along the length direction of the slot die coater is a key parameter for determining the coating quality, it is necessary to measure the micro-slit gap width and its uniformity accurately
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