Abstract
In this paper, a modeling approach is introduced that includes micromechanical components into the system level simulation. In our approach, a complicated microsystem is first decomposed into a set of much simpler components. Each component is treated as an n-pole functional block. The behavioral model of a micromechanical component is generated from the finite element (FE) analysis results of its corresponding 2D/3D FE model by using the system identification methods. The behavioral model is then described by an analog hardware description language (AHDL). The global performance of the system is simulated in an analog behavioral simulator by connecting the subdivided behavioral models together. The proposed approach can be implemented by combining the commercially available software ANSYS (for finite element method (FEM) analysis), MATLAB (for system identification) and an analog behavioral simulator such as SPECTRE (for system level simulation) together. As examples of the proposed methodology, simulations and results of a linear lateral resonator, a Q-controlled resonator and a series two-resonator micromechanical bandpass filter are presented.
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