Abstract
The system treated in this paper is a model of a moulding press for a fabrication process of LSI packages. Performance of force control is important to obtain sufficient quality of the moulding. Considering uncertainty caused by flow characteristics of a servo valve and mechanical stiffness of a frame of the press machine, a method of designing a robust force controller by applying H infinity control theory is proposed. Performance of the robust controller is examined using an experimental setup of a water-hydraulic servo system
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