Abstract
A novel method is presented for correcting the defocusing and aberrations by means of the eight-pole stigmator, compensating both astigmatism and coma aberrations by second and third order astigmatisms in addition to the dynamic focusing. Owing to the electronic feedback circuit compensating the defocus and deflection aberrations, which is connected with both a reducing lens and the stigmator from the deflectors, a constant beam spot over a wide scanned area can be realised consistently. Various caustic patterns of the corrected deflected beam are graphically displayed by computer calculations.
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