Abstract

The real-time measurement of current and voltage waveforms and the Emission Microscopy analysis, both performed during periodic non-destructive simulated ESD events on ESD protection devices, allows (i) the study of the dynamic electrical behaviour and the ESD current distribution of single protection structure and (ii) the localization of the ESD current path along a complex protection network. These two techniques, in addition to the traditional ESD step stress test, can be used to evaluate both the hardness and the effectiveness of ESD protection devices.

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