Abstract
Abstract A method which can be used for standardizing the manufacturing process to fabricate an integrated temperature and relative humidity (RH) sensor based on fiber Bragg grating (FBG)and polyimide (PI) capillary is proposed. By this method, the temperature and RH cross-sensitivity problems and the influence on the humidity sensor due to the inhomogeneity of the coated moisture sensitive material film can be avoided. In this paper, two integrated temperature and RH sensors based on dual FBGs and PI capillaries with 0.03 mm and 0.05 mm wall thickness are fabricated respectively, and a measuring system is built to study the characteristics of the proposed sensors. The result shows that the temperature linearity of this sensor is above 99%, and the temperature sensitivity is higher than that of the bare FBG during temperature measurement. For the RH measurement, the sensor with 0.03 mm wall thickness PI capillary has better linearity and reproducibility, and the sensor with 0.05 mm wall thickness PI capillary has greater sensitivity and hysteresis.
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