Abstract
This paper presents a general microfabrication method for precision patterning of thin-film poly(dimethylsiloxane) (PDMS). The method enables PDMS microstructures with controlled lateral dimensions and thickness on a silicon or glass substrate. Two applications based on this new method are discussed. First, a scanning probe microscopy (SPM) probe with PDMS tip is developed and used for scanning probe contact printing (SPCP). Second, this paper demonstrates surface micromachined membranes with integrated silicone gaskets.
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