Abstract
In this paper, we proposed a method to determine the focal spot location of two photon polymerization. Four spiral squares with eleven lines were fabricated in four corners of a 200 μm × 200 μm square area. The cutting location of these lines changed continuously. The first layer of structure to be processed could be accurately positioning in any position of this 200 μm × 200 μm square area by observing and analyzing the processing results of the four spiral squares. With this method, the height of microstructure to be processed could be accuracy controlled. Four meshing gears were successfully fabricated with the average deviation of 2.30% in height.
Highlights
When femtosecond laser are tightly focused into a photosensitive material, two photon polymerization can be initiated by two photon absorption in the focal region and produce two dimensional or three dimensional structure
The installation error and flatness error of the three dimensional platform influence the accuracy of structure in height.[18]
Four spiral squares were fabricated in four corners of a 200 μm × 200 μm square area for assistance positioning
Summary
When femtosecond laser are tightly focused into a photosensitive material, two photon polymerization can be initiated by two photon absorption in the focal region and produce two dimensional or three dimensional structure. Two photon polymerization is known as true three dimensional fabrication because the resolution of two photon polymerization can break the diffraction limit and the beam can be focused inside of the material not just on the surface of it This technology plays a significant role in many areas, such as biomedicine,[1,2,3] microfluidics,[4,5] photonic crystal,[6] micro electro-mechanical systems[7,8,9] and micro-optics.[10,11] The first and foremost step of two photon polymerization is to let the focal spot focused on the cover slip with proper truncation location, otherwise The the structures fabricated would be washed away or fall down after developing.[12,13] There has been several concentrated research effort to solve this problem. As a proof of this method, four meshing gears were
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