Abstract
A metal-insulator-metal electron emitter containing a sandwiched insulator layer composed of porous aluminum oxide Al2O3 was fabricated. The electron emission characteristics of the electron emitter were investigated under vacuum and xenon. Treatment with H3PO4 and rapid thermal oxidation increased the electric field inside the insulator and improved the quality of porous Al2O3, resulting in higher efficiency and less fluctuation of electron emission. The maximum current and efficiency of electron emission reached 1.05 mA/cm2 and 51.2%, respectively, under a pressure of 1.0×10−4 Pa. In addition, electrons were injected into xenon and 147 nm vacuum ultraviolet emission was detected in xenon at a pressure of 5.0 × 102 Pa. This electron emitter has a great potential for use as an ultraviolet radiation source.
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