Abstract
A rectangular-groove metal-dielectric reflective grating is designed, which includes the inner metal films and the outside dielectric film for achieving high diffraction efficiency at the -1st order with wideband low enhancement of electric field intensity inside the grating. By using rigorous coupled-wave analysis (RCWA) and simulated annealing algorithm, an optimized grating with diffraction efficiency exceeding 95% over 26nm wavelength bandwidth and the maximum enhancement of electric field intensity in solid material less than 1.2 over 70nm wavelength bandwidth is obtained. The optimized metal-dielectric reflective grating should be useful in the applications of high-power femtosecond laser system.
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